Silicon diaphragm pressure sensors have been fabricated by anodic oxidation etch-stop to reduce the pressure

sensitivity variation. The diaphragm thickness is precisely controlled by automatic etch-stop in hydrazine-water solution. p-Type piezoresistive elements are fabricated by boron ion implantation on a (100) orientation n-type

epitaxial layer.

TRUBER ELASTOMERS Silicon driaphragm are coming with fabric insertion and resistant to temperatures upto 250C

Technical Details